A HARPSS polysilicon vibrating ring gyroscope
نویسندگان
چکیده
منابع مشابه
A HARPSS Polysilicon Vibrating Ring Gyroscope
This paper presents the design, fabrication, and testing of an 80m-thick, 1.1 mm in diameter high aspect-ratio (20:1) polysilicon ring gyroscope (PRG). The vibrating ring gyroscope was fabricated through the high aspect-ratio combined poly and single-crystal silicon MEMS technology (HARPSS). This all-silicon single-wafer technology is capable of producing electrically isolated vertical electrod...
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There are several application areas where the simultaneous measurement of rates of rotation about three mutually orthogonal axes is required. In this paper the principle features of a 3-axis vibrating ring gyroscope are described. The fabrication process for the gyroscope is presented and employs standard MEMS techniques. The modal properties for the ring are measured experimentally using laser...
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This letter reports, for the first time, an integrated polysilicon microhemispherical resonating gyroscope (μHRG) with selfaligned drive, sense, and tuning electrodes, all fabricated using a single wafer process. The polysilicon hemispherical shell is 700 nm in thickness and 1.2 mm in diameter, resulting in a 1:3000 aspect ratio threedimensional (3-D) microstructure. The quality factor of the w...
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متن کاملDesign and operation of a very large ring laser gyroscope.
The design and initial operation of a vertical square He-Ne ring laser G0 with a perimeter of 14 m is discussed. This builds on earlier demonstrations of the feasibility of large ring lasers (perimeter approximately 4 m) for single-mode gyroscope operation and with lesser pulling than navigation gyroscopes. With servoing of the rf excitation to yield single-mode operation, G0 gave a quality fac...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2001
ISSN: 1057-7157
DOI: 10.1109/84.925732